5B9 – Micro-Nano Fabrication and NanoEngineering

This module offers an in-depth exploration of micro- and nanoscale fabrication techniques and their applications in advanced engineering and scientific fields. Students will study the fundamental principles and cutting-edge methods used in the design, fabrication, and characterization of micro- and nanostructures, gaining both theoretical understanding and practical experience.

Core Topics

• Fabrication Techniques: Photolithography, electron beam lithography, soft lithography, thin-film deposition, etching processes, and self-assembly techniques.
• Integration with Nanoengineering: Application of fabrication technologies within nanoengineering principles and system-level design.
• Applications: Thin-film electronics, flexible electronics, large-scale electronics, microfluidic systems, biomedical devices, and energy harvesting platforms.

Practical Design and Laboratory Work
Students will gain hands-on experience through laboratory sessions and project-based learning. Activities will include process design, adherence to cleanroom protocols, and critical evaluation of fabrication techniques.

Learning Outcomes
By the end of this module, you will:

• Understand the principles and methods of micro- and nanoscale fabrication.
• Be able to design, fabricate, and characterise micro- and nanostructures.
• Recognise the integration of fabrication technologies with nanoengineering applications.
• Gain practical experience in process design, cleanroom practice, and evaluation of fabrication techniques.
• Be equipped with the knowledge and skills to innovate in micro-nano technologies and their real-world applications.